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High-impedance Buffer Amplifier For Micro-electromechanical System (MEMS) Resonator Measurements

机译：用于微机电系统（mEms）谐振器测量的高阻抗缓冲放大器

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The electrical performance of micro-electromechanical system (MEMS) resonators built at the U.S. Army Research Laboratory (ARL) requires measurement techniques that do not overstress the devices. As a result, we need a high-impedance amplifier that operates over an extended frequency range suitable for use ahead of a 50-ohm vector network analyzer (VNA). The prototype amplifier 'buffers' the resonator from the VNA. This amplifier was designed, fabricated, and tested during a fourweek period. It demonstrates that future designs using operational amplifiers with wider frequency ranges will be suitable for this application.

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年度 2010
页码 p.1-16
总页数 16
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Electrical properties ; Resonators ; Microelectromechanical systems ; Operational amplifiers ; Frequency bands ; Prototypes ; Measurement ; Buffers;

机译：电气特性;谐振器;微机电系统;运算放大器;频带;原型;测量;缓冲器;

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2. High-impedance buffer amplifier's input includes ESD protection [J] . Eugene Palatnik EDN Asia . 2007,第1期

机译：高阻抗缓冲放大器的输入包括ESD保护
3. Nitrogen-laser-pumped resonator-amplifier tunable dye laser system for fluorescence decay lifetime measurements [J] . Sami D. Alaruri Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2014,第17期

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4. Some conception on the application of Micro-electromechanical Systems sensor and actuator(MEMS) to near space airship [C] . Zhang Dongmei, Duan Dengping, Chen Jian International conference on smart materials and nanotechnology in engineering . 2007

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5. Interface Circuitry Design for a MEMS Resonator-Based Vacuum Measurement System [D] . Taghvaei, Mohammad Ali 2012

机译：基于MEMS谐振器的真空测量系统的接口电路设计
6. A Sub-mW 18-MHz MEMS Oscillator Based on a 98-dBΩ Adjustable Bandwidth Transimpedance Amplifier and a Lamé-Mode Resonator [O] . Anoir Bouchami, Mohannad Y. Elsayed, Frederic Nabki 2019

机译：基于98dBΩ可调带宽跨阻放大器和Lamé模式谐振器的SubmW 18MHz MEMS振荡器
7. Special issue: Micro-electromechanical systems (MEMS) [O] . Zhuangde Jiang 2017

机译：特殊问题：微机电系统（MEMS）

High-impedance Buffer Amplifier For Micro-electromechanical System (MEMS) Resonator Measurements

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