CVC Silicon Carbide Optical Properties and Systems (Preprint)

机译：CVC碳化硅光学特性和系统（预印本）

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The chemical vapor composites (CVC) process provides for the rapid manufacture of near net shape, reduced residual stress silicon carbide (SIC) suitable for high performance optics. The reduction or elimination of residual stress provides several key advantages: (1) increased growth rate, (2) high yields and (3) near net shape deposition of complex geometries. Near net shape deposition allows for fabrication of spherical and aspherical optics without machining of the optical surface. Final surface figures of optical flats are typically better than l/lO delta (P-V) and a 2-5A surface roughness. A comparison of ultraviolet spectrum reflectance of CVC SiC and that of single crystal SiC is discussed, The complex optical constants of CVC SiC in the mid- infrared spectrum are also presented.

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Foss, J. C.;
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年度 2005
页码 1-11
总页数 11
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Optical properties; Chemical vapor deposition; Silicon carbides; Machining; Ultraviolet spectra; Near net shape forming; Residual stress; Composite materials; Single crystals;

机译：光学性质;化学气相沉积;碳化硅;加工;紫外光谱;近净成形;残余应力;复合材料;单晶;

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3. Effect of discharge power and silicon content on optical and mechanical properties of carbon-rich amorphous silicon carbide films obtained by PECVD [J] . Lukianov Anatolii N., Klyui Nickolai I, Sha Bo, Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2019,第期

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CVC Silicon Carbide Optical Properties and Systems (Preprint)

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