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Correlated Dopant Distributions in Delta-Doped Layers.

机译:三角形掺杂层中相关的掺杂分布。

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In this paper we discuss the observation of correlations in the spatial distribution of Be atoms in delta doped layers. In Si delta doped samples we show that correlations in the charge distribution occur when DX centers are populated. The mobility enhancement we measure in our structures agrees with the calculated enhancement due to correlations effects.

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