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Development of an In-Line Minority-Carrier Lifetime Monitoring Tool for Process Control during Fabrication of Crystalline Silicon Solar Cells. Annual Subcontractor Report, June 2003

机译：在结晶硅太阳能电池制造过程中开发用于过程控制的在线少数载体寿命监测工具。年度分包商报告，2003年6月

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As the production volumes of crystalline silicon manufacturing lines have grown in recent years, the demand for improved process control and process monitoring in manufacturing has increased. Since 1995, Sinton Consulting Inc. has been providing several tools to both Universities and industry for their R&D laboratories. For example, over 100 Sinton minority-carrier lifetime instruments are in use worldwide. The purpose of the work reported here is to adapt these successful R&D instruments and techniques to be directly applicable to process control and monitoring in production environments. Under the PV Manufacturing R&D subcontract Development of an In-Line, Minority- Carrier Lifetime Monitoring Tool for Process Control during Fabrication of Crystalline Silicon Solar Cells, Sinton Consulting developed prototypes for several new instruments for use in the manufacture of silicon solar cells. These instruments are based on two families of R&D instruments that were previously available, an illumination vs. opencircuit- voltage technique and the quasi-steady state RF photoconductance technique for measuring minority-carrier lifetime. Compared to the previous instruments, the new prototypes are about 20 times faster per measurement, and have automated data analysis that does not require user intervention even when confronted by challenging cases.

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Sinton, R. A.;
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年度 2004
页码 1-28
总页数 28
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Silicon ; Silicon solar cells ; Carrier lifetime ; Carrier density ; Fabrications ; Dislocations ; Carrier mobility;

机译：硅;硅太阳能电池;载流子寿命;载流子密度;制造;位错;载流子迁移率;

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专利

1. Transverse probe optical lifetime measurement as a tool for in-line characterization of the fabrication process of a silicon solar cell [J] . A. Irace, L. Sirleto, G.F. Vitale Solid-State Electronics . 1999,第12期

机译：横向探针光学寿命测量作为在线表征硅太阳能电池制造过程的工具
2. Statistical analysis of local shunts and their relationship with minority-carrier lifetime in multi-crystalline silicon solar cells [J] . David M., Fuyuki T., Matsunami H. Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 2001,第1a4期

机译：多晶硅太阳能电池局部分流的统计分析及其与少数载流子寿命的关系
3. Effects of thermal budget in n-type bifacial solar cell fabrication processes on effective lifetime of crystalline silicon [J] . Tomihisa Tachibana, Kyotaro Nakamura, Atsushi Ogura, AIP Advances . 2017,第4期

机译：n型双面太阳能电池制造工艺中的热收支对晶体硅有效寿命的影响
4. MAiA - A NEW VERSATILE IN-LINE ETCHING/PECVD TOOL CONCEPT FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS [C] . M. Grimm, H. Schlemm, A. Lux, European Photovoltaic Solar Energy Conference . 2008

机译：Maia - 一种用于处理晶体硅太阳能电池的新多功能在线蚀刻/ PECVD工具概念
5. Development of an Industrial Fabrication Process for Next Generation, Thinner and Larger Crystalline Silicon (c-Si) Wafer-Based Solar Cells. [D] . Nguyen, Anh V. 2012

机译：开发用于下一代，更薄，更大晶体硅（c-Si）晶圆的太阳能电池的工业制造工艺。
6. Development of an In-line Minority-Carrier Lifetime Monitoring Tool for Process Control during Fabrication of Crystalline Silicon Solar Cells: Final Technical Report, 2 August 2002-15 November 2004 [O] . R A Sinton 2004

机译：开发晶体硅太阳能电池制造过程中的过程控制中的少数型载体寿命监测工具：最终技术报告，2004年8月2日

Development of an In-Line Minority-Carrier Lifetime Monitoring Tool for Process Control during Fabrication of Crystalline Silicon Solar Cells. Annual Subcontractor Report, June 2003

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