Optimal Dynamic Performance for High-Precision Actuators/Stages

机译：高精度执行器/平台的最佳动态性能

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摘要

System dynamic performance of actuator/stage groups, such as those found in optical instrument positioning systems and other high-precision applications, is dependent upon both individual component behavior and the system configuration. Experimental modal analysis techniques were implemented to determine the six degree of freedom stiffnesses and damping for individual actuator components. These experimental data were then used in a multibody dynamic computer model to investigate the effect of stage group configuration. Running the computer model through the possible stage configurations and observing the predicted vibratory response determined the optimal stage group configuration. Configuration optimization can be performed for any group of stages, provided there is stiffness and damping data available for the constituent pieces.

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Preissner, C.; Lee, S. H.; Royston, T. J.;
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年度 2002
页码 1-9
总页数 9
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Actuators; Vibration; Dynamic performance;

机译：执行器;振动;动态性能;

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1. Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation [J] . Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, IEEJ Journal of Industry Applications . 2016,第2期

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2. Optimum design of a novel redundantly actuated parallel manipulator with multiple actuation modes for high kinematic and dynamic performance [J] . Liang Dong, Song Yimin, Sun Tao, Nonlinear dynamics . 2016,第1a2期

机译：具有多种驱动模式的新型冗余驱动并联机械手的优化设计，具有较高的运动学和动态性能
3. Design and control of a single-stage dual-actuator system for high-precision manufacturing [J] . Michael D. Kim, Kwang-Hee Lee, Kyung-Tae Nam, Microsystem technologies . 2014,第2期

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4. Optimal dynamic performance for high-precision actuators/stages [C] . Curt Preissner, Soon-Hong Lee, Thomas J. Royston, Conference on Optomechanical Design and Engineering 2002, Jul 7-9, 2002, Seattle, USA . 2002

机译：高精度执行器/平台的最佳动态性能
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6. Robust Position Control of an Over-actuated Underwater Vehicle under Model Uncertainties and Ocean Current Effects Using Dynamic Sliding Mode Surface and Optimal Allocation Control [O] . Mai The Vu, Tat-Hien Le, Ha Le Nhu Ngoc Thanh, 2021

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7. Optimal dynamic performance for high-precision actuators/stages [O] . Curt Preissner, Soon-Hong Lee, Thomas J. Royston, 2002

机译：高精度执行器/级的最佳动态性能

Optimal Dynamic Performance for High-Precision Actuators/Stages

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