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首页> 美国政府科技报告 >Narrowband Impedance Measurement Technique forThickness Shear Mode Resonator Sensors
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Narrowband Impedance Measurement Technique forThickness Shear Mode Resonator Sensors

机译：厚度剪切模式谐振传感器的窄带阻抗测量技术

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摘要

This paper discusses a new technique for measuring the impedance response of thickness shear mode (TSM) resonators used as fluid monitors and chemical sensors. The technique simulates the swept frequency measurements performed by an automatic network analyzer (ANA), determining the complex reflection scattering parameter, S1l, from single port devices. Unlike oscillator circuits most often used with TSM resonators, narrowband spectral measurements are not limited by cable capacitance between resonator and oscillator allowing placement of the sensor in severe environments. Only noise produced by long cable lengths limits performance and sensor sensitivity. This new technique utilizes a simple swept frequency source operating near the crystal resonance, a unique directional coupler to provide the reference and reflected RF signals, an I & Q demodulation circuit that returns two dc voltages, and computational algorithms for determining sensor response parameters. Performance, has been evaluated by comparing TSM resonator responses using this new technique to those from a commercial ANA.

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