A back-illuminated megapixel CMOS image sensor

机译：背照式百万像素CmOs图像传感器

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摘要

In this paper, we present the test and characterization results for a back-illuminated megapixel CMOS imager. The imager pixel consists of a standard junction photodiode coupled to a three transistor-per-pixel switched source-follower readout [1]. The imager also consists of integrated timing and control and bias generation circuits, and provides analog output. The analog column-scan circuits were implemented in such a way that the imager could be configured to run in off-chip correlated double-sampling (CDS) mode. The imager was originally designed for normal front-illuminated operation, and was fabricated in a commercially available 0.5 pn triple-metal CMOS-imager compatible process. For backside illumination, the imager was thinned by etching away the substrate was etched away in a post-fabrication processing step.

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Pain, Bedabrata; Cunningham, Thomas; Nikzad, Shouleh; Hoenk, Michael; Jones, Todd; Wrigley, Chris; Hancock, Bruce;
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年度 2005
页码 1-8
总页数 8
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
ANALOG CIRCUITS; BIAS; CHARACTERIZATION; CHIPS; CIRCUITS; CMOS; ETCHING; FABRICATION; ILLUMINATING; PHOTODIODES; PIXELS; READOUT; SAMPLING; SUBSTRATES; SWITCHING; TRANSISTORS; Complementary Metal Oxide Semiconductor imager (CMOS); back - illumination;

机译：模拟电路;偏压;表征;芯片;集成电路; CmOs;蚀刻;制造; ，照明;光二极管;像素;读出;采样;的底物;交换;晶体管，互补金属氧化物半导体成像器（CmOs）;背光照明;

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2. High-speed back-illuminated CMOS sensor for photon-counting-type imaging-spectroscopy in the soft X-ray range [J] . Narukage Noriyuki, Ishikawa Shin-nosuke, Sakao Taro, Nuclear Instruments & Methods in Physics Research . 2020,第Jana11期

机译：用于软X射线范围内的光子计数型成像光谱的高速背照式CMOS传感器
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机译：6.9- $ mu $ m像素间距背照明的全局快门CMOS图像传感器像素并行14位亚阈值ADC
4. 7.8 A 1-inch 17Mpixel 1000fps Block-Controlled Coded-Exposure Back-Illuminated Stacked CMOS Image Sensor for Computational Imaging and Adaptive Dynamic Range Control [C] . Tomoki Hirata, Hironobu Murata, Hideaki Matsuda, IEEE International Solid- State Circuits Conference . 2021

机译：7.8 1英寸17mpixel 1000FPS控制的块编码曝光后照明堆叠CMOS图像传感器，用于计算成像和自适应动态范围控制
5. High-resolution gamma-ray imaging with columnar scintillators and CCD/CMOS sensors, and FastSPECT III: A third-generation stationary SPECT imager. [D] . Miller, Brian William. 2011

机译：使用柱状闪烁体和CCD / CMOS传感器以及FastSPECT III的高分辨率伽马射线成像：第三代固定式SPECT成像器。
6. A 250 m Direct Time-of-Flight Ranging System Based on a Synthesis of Sub-Ranging Images and a Vertical Avalanche Photo-Diodes (VAPD) CMOS Image Sensor [O] . Yutaka Hirose, Shinzo Koyama, Motonori Ishii, 2018

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7. Paper A 1/1.7-inch 20Mpixel Back-Illuminated Stacked CMOS Image Sensor with Multi-Functional Modes [O] . Hayato Wakabayashi, Atsushi Suzuki, Toshiki Kainuma, 2016

机译：纸带有多功能模式的1 / 1.7英寸20mpixel背光堆叠CMOS图像传感器

A back-illuminated megapixel CMOS image sensor

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