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Effect of change in Ba concentration on crystallintiy and dielectric constant of the sol-gel deposited barium strontium titante (BST) films on n-type Si wafer

机译：Ba浓度变化对n型Si晶片上溶胶-凝胶沉积钛酸锶锶（BST）膜的结晶度和介电常数的影响

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摘要

Thin (Bax, Sr1 – x)TiO3 (BST) films of different chemical compositions (x 0.3 0.5 & 0.7) were prepared by the sol-gel process using barium acetate,strontium acetate and titanium isopropoxide as metal alkoxides. The titanium isopropoxide was dissolved in acetyl acetone (chelating agent) and mixing the resultant solution with barium and strontium acetate dissolved inudacetic acid solution. The alkoxide group in titanium isopropoxide was replaced by acetate ligand and after hydrolysis and condensation process a complex solution was obtained. This solution was deposited on n-type (111) Si wafers by spin coating and after drying at 350 C the samples were annealed at 700 C in oxygen ambient. The precise control of composition ofuddifferent species is important for producing good quality films having high crystallinity and dielectric constant. The crystallinity of the film was found to increase with the increase of Ba concentration as found from X-ray diffraction. The calculated value of dielectric constant from CVudmeasurements revealed that the film of (Ba0.7, Sr0.3) TiO3 had the maximum dielectric constant as 463 and the surface was examined by SEM.When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/27856
机译：采用乙酸钡，乙酸锶和异丙醇钛作为金属醇盐，通过溶胶-凝胶法制备了不同化学组成（x 0.3 0.5和0.7）的（Bax，Sr1-x）TiO3（BST）薄膜。将异丙醇钛溶解在乙酰丙酮（螯合剂）中，然后将生成的溶液与溶解在过乙酸溶液中的乙酸钡和乙酸锶混合。异丙醇钛中的醇盐基团被乙酸盐配体取代，经过水解和缩合过程后，获得了复杂的溶液。通过旋涂将该溶液沉积在n型（111）硅晶片上，并在350℃下干燥后，将样品在氧气环境中在700℃下退火。精确控制不同种类的成分对于生产具有高结晶度和介电常数的高质量薄膜很重要。如从X射线衍射所发现的，发现膜的结晶度随着Ba浓度的增加而增加。由CV 测得的介电常数计算值表明（Ba0.7，Sr0.3）TiO3薄膜的最大介电常数为463，并且表面用SEM进行了检查。链接http://essuir.sumdu.edu.ua/handle/123456789/27856

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