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An Integrated Approach Towards in-situ Diagnostics of On-Surface and Gas Phase Reactions: Direct On-Chip Fabrication of Gas Sensing Materials via Chemical Vapor Deposition

机译：用于表面和气相反应的原位诊断的集成方法：通过化学气相沉积直接在芯片上制备气敏材料

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Fischer Thomas;
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年度 2015
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An Integrated Approach Towards in-situ Diagnostics of On-Surface and Gas Phase Reactions: Direct On-Chip Fabrication of Gas Sensing Materials via Chemical Vapor Deposition

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