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Fluid delivery device with hydrophobic surface

机译:具有疏水表面的流体输送装置

摘要

Embodiments of the present invention are directed to a liquid delivery apparatus. A non-limiting example of the apparatus includes a substrate including a cavity formed in a surface of the substrate. The apparatus can also include a membrane disposed on the surface of the substrate covering an opening of the cavity. The apparatus can also include a hydrophobic layer disposed on the membrane. The apparatus can also include a seal disposed between the membrane and the substrate, wherein the seal surrounds the opening of the cavity. The apparatus can also include an electrode layer coupled to the membrane.
机译:本发明的实施例涉及液体输送设备。该设备的非限制性示例包括基板,该基板包括在基板的表面中形成的腔。该设备还可以包括设置在覆盖空腔的开口的衬底的表面上的膜。该设备还可以包括设置在膜上的疏水层。该设备还可包括设置在膜和基底之间的密封件,其中该密封件围绕腔的开口。该设备还可以包括连接至膜的电极层。

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