首页> 外国专利> - STRAIN-RELAXING METHODS AND METHODS OF FORMING STRAIN-RELAXED SEMICONDUCTOR LAYERS AND SEMICONDUCTOR DEVICES USING THE SAME AND RELATED SEMICONDUCTOR STRUCTURES

- STRAIN-RELAXING METHODS AND METHODS OF FORMING STRAIN-RELAXED SEMICONDUCTOR LAYERS AND SEMICONDUCTOR DEVICES USING THE SAME AND RELATED SEMICONDUCTOR STRUCTURES

机译:-应变松弛方法和使用相同和相关的半导体结构形成应变松弛的半导体层和半导体器件的方法

摘要

The present invention relates to a strain mitigation method, a strain-relaxing semiconductor layer and a method of forming a semiconductor device using the same, and related semiconductor structures. According to the strain mitigation method according to the present invention, a porous region is formed on a surface of a semiconductor substrate, a lattice-matched first semiconductor layer is formed on the porous region, and a first semiconductor is formed. Forming a second semiconductor layer on the layer, wherein the second semiconductor layer is formed of a strained semiconductor layer and includes relaxing the second semiconductor layer.
机译:应变缓解方法,应变松弛半导体层和使用其的半导体器件的形成方法以及相关的半导体结构技术领域本发明涉及一种应变缓解方法,应变松弛半导体层和使用该应变降低半导体层的半导体器件的形成方法以及相关的半导体结构。根据本发明的应变减轻方法,在半导体基板的表面上形成多孔区域,在该多孔区域上形成晶格匹配的第一半导体层,并形成第一半导体。在该层上形成第二半导体层,其中第二半导体层由应变半导体层形成并且包括松弛第二半导体层。

著录项

  • 公开/公告号KR102067424B1

    专利类型

  • 公开/公告日2020-01-20

    原文格式PDF

  • 申请/专利权人 삼성전자 주식회사;

    申请/专利号KR20150038179

  • 发明设计人 왕 웨이-이;로더 마크 스티븐;

    申请日2015-03-19

  • 分类号H01L21/20;H01L21/306;H01L21/8238;

  • 国家 KR

  • 入库时间 2022-08-21 11:05:30

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