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- STRAIN-RELAXING METHODS AND METHODS OF FORMING STRAIN-RELAXED SEMICONDUCTOR LAYERS AND SEMICONDUCTOR DEVICES USING THE SAME AND RELATED SEMICONDUCTOR STRUCTURES
- STRAIN-RELAXING METHODS AND METHODS OF FORMING STRAIN-RELAXED SEMICONDUCTOR LAYERS AND SEMICONDUCTOR DEVICES USING THE SAME AND RELATED SEMICONDUCTOR STRUCTURES
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机译:-应变松弛方法和使用相同和相关的半导体结构形成应变松弛的半导体层和半导体器件的方法
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摘要
The present invention relates to a strain mitigation method, a strain-relaxing semiconductor layer and a method of forming a semiconductor device using the same, and related semiconductor structures. According to the strain mitigation method according to the present invention, a porous region is formed on a surface of a semiconductor substrate, a lattice-matched first semiconductor layer is formed on the porous region, and a first semiconductor is formed. Forming a second semiconductor layer on the layer, wherein the second semiconductor layer is formed of a strained semiconductor layer and includes relaxing the second semiconductor layer.
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