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Drag pump and vacuum pump set including drag pump
Drag pump and vacuum pump set including drag pump
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机译:牵引泵和真空泵组,包括牵引泵
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摘要
A drag pump for pumping gas and a set of vacuum pumps comprising the drag pump are disclosed. The drag pump includes a rotor configured to drive gas to be rotated within the stator component and pumped from the gas inlet to the gas outlet, and a magnetic bearing to rotatably mount the rotor in the pump, to contact the gas to be pumped. At least a portion of the configured rotor and stator components are configured to operate at temperatures above 130 ° C.
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