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X- X- X-RAY ANALYSIS SYSTEM AND X-RAY ANALYSIS METHOD
X- X- X-RAY ANALYSIS SYSTEM AND X-RAY ANALYSIS METHOD
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机译:X- X- X射线分析系统和X射线分析方法
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摘要
The present invention can simplify the shielding facility and can accurately obtain the ratio of the density of each of the plurality of elements included in the sample and the intensity of the fluorescent X-rays by the plurality of elements in a non-destructively short time. And an X-ray analysis method, the X-ray analysis system comprising: a sample holding chamber for holding a sample including first and second elements; An X-ray generator for irradiating X-rays to the sample; A first detector for detecting transmission X-rays emitted from the sample and outputting absorbance analysis data; A second detector for detecting fluorescence X-rays emitted from the sample and outputting fluorescence analysis data; The density of the first element is calculated from the absorbance analysis data, and the ratio of the intensity of the fluorescence X-rays by the first element and the intensity of the fluorescence X-rays by the second element is calculated from the fluorescence analysis data. A calculator calculating a density of the second element by using a ratio of the intensities; And a display unit configured to output a ratio of the density of the first element, the density and the intensity of the second element.
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