首页> 外国专利> ATOMIC FORCE MICROSCOPY SYSTEM, METHOD FOR MAPPING ONE OR MORE SUBSURFACE STRUCTURES LOCATED IN A SEMICONDUCTOR DEVICE OR FOR MONITORING LITHOGRAPHIC PARAMETERS IN A SEMICONDUCTOR DEVICE AND USE OF SUCH AN ATOMIC FORCE MICROSCOPY SYSTEM

ATOMIC FORCE MICROSCOPY SYSTEM, METHOD FOR MAPPING ONE OR MORE SUBSURFACE STRUCTURES LOCATED IN A SEMICONDUCTOR DEVICE OR FOR MONITORING LITHOGRAPHIC PARAMETERS IN A SEMICONDUCTOR DEVICE AND USE OF SUCH AN ATOMIC FORCE MICROSCOPY SYSTEM

机译：原子力显微镜系统，映射位于半导体设备中的一个或多个子表面结构或用于监视半导体设备中的光刻参数的方法以及使用此类原子力显微镜系统的方法

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摘要

Atomic force microscopy system comprising an atomic force microscopy device and a substrate carrier having a carrier surface carrying a substrate. The substrate has a substrate main surface and a substrate scanning surface opposite the substrate main surface. The atomic force microscopy device comprises a scan head including a probe. The probe comprises a cantilever and a probe tip arranged on the cantilever. The atomic force device further comprises an actuator cooperating with at least one of the scan head or the substrate carrier for moving the probe tip and the substrate carrier relative to each other in one or more directions parallel to the carrier surface for scanning of the substrate scanning surface with the probe tip. A signal application actuator applies, during said scanning, an acoustic input signal to the substrate, said acoustic input signal generating a first displacement field in a first displacement direction only. A tip position detector monitors motion of the probe tip relative to the scan head during said scanning for obtaining an output signal. The tip position detector is arranged for monitoring motion of the probe tip only in a direction orthogonal to the displacement direction.

机译：原子力显微镜系统，其包括原子力显微镜装置和衬底载体，该衬底载体具有承载衬底的载体表面。衬底具有衬底主表面和与衬底主表面相对的衬底扫描表面。原子力显微镜设备包括具有探头的扫描头。探针包括悬臂和布置在悬臂上的探针尖端。原子力装置还包括致动器，该致动器与扫描头或基板载体中的至少一个配合，以使探针尖端和基板载体在平行于载体表面的一个或多个方向上相对于彼此移动，以进行基板扫描。探头尖端表面。信号施加致动器在所述扫描期间将声输入信号施加到基板，所述声输入信号仅在第一位移方向上产生第一位移场。尖端位置检测器在所述扫描期间监视探针尖端相对于扫描头的运动，以获得输出信号。尖端位置检测器布置成仅在与位移方向正交的方向上监视探针尖端的运动。

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公开/公告号US2020309816A1

专利类型
公开/公告日2020-10-01

原文格式PDF
申请/专利权人 NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO;
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申请/专利号US201816769951
发明设计人 LAURENT FILLINGER;PAUL LOUIS MARIA JOSEPH VAN NEER;DANIELE PIRAS;MARCUS JOHANNES VAN DER LANS;MAARTEN HUBERTUS VAN ES;HAMED SADEGHIAN MARNANI;
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申请日2018-12-04
分类号G01Q60/24;G01N29/06;
国家 US
入库时间 2022-08-21 11:22:50

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