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METHOD AND APPARATUS FOR PLASMA-TREATING COMPOUND CONTAINING METAL ATOM HAVING BOILING POINT HIGHER THAN BOILING POINT OF METAL MATERIAL CONSISTING ONLY OF METAL ATOM TO OBTAIN PRODUCT DIFFERENT FROM COMPOUND
METHOD AND APPARATUS FOR PLASMA-TREATING COMPOUND CONTAINING METAL ATOM HAVING BOILING POINT HIGHER THAN BOILING POINT OF METAL MATERIAL CONSISTING ONLY OF METAL ATOM TO OBTAIN PRODUCT DIFFERENT FROM COMPOUND
PROBLEM TO BE SOLVED: To provide a method for plasma-treating a compound containing metal atom having a boiling point higher than a boiling point of a metal material consisting only of metal atoms to obtain a product different from the compound, wherein the lighting of plasma can be stably started.;SOLUTION: The present invention provides a method for plasma-treating a compound containing metal atom having a boiling point higher than a boiling point of a metal material consisting only of metal atoms to obtain a product different from the compound. The method comprises a procedure of generating the product different from the compound by irradiating the compound with a plasma of a reactive gas that does not substantially contain an oxygen atom in a reaction chamber set at a temperature at which the compound is kept in a gaseous state. The lighting of plasma is started when the temperature in the reaction chamber is outside a predetermined temperature range. The predetermined temperature range is within a range that is not less than the boiling point of the metal material having only metal atoms at the same pressure as the pressure in the reaction chamber set in the procedure and is less than the boiling point of the compound.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2020,JPO&INPIT
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