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PATTERNED WAFER DEFECT INSPECTION SYSTEM AND METHOD
PATTERNED WAFER DEFECT INSPECTION SYSTEM AND METHOD
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机译：图案晶圆缺陷检测系统和方法
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摘要
A system for inspecting semiconductor devices is provided. The system includes a region system selecting a plurality of regions from a semiconductor wafer. A golden template system generates a region golden template for each region, such as to allow a die image to be compared to golden templates from a plurality of regions. A group golden template system generates a plurality of group golden templates from the region golden templates, such as to allow the die image to be compared to golden templates from a plurality of group golden templates.
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