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Pixel array structure for terahertz image sensor terahertz image sensor method of manufacturing the same and image apparatus comprising the same
Pixel array structure for terahertz image sensor terahertz image sensor method of manufacturing the same and image apparatus comprising the same
The present invention discloses a pixel array structure for a terahertz image sensor, a terahertz image sensor, a manufacturing method thereof, and an imaging apparatus including the same. In the pixel array structure of the terahertz image sensor of the present invention, a plurality of effective unit pixels each having an antenna for detecting a terahertz signal, a heating element for generating heat, a first bolometer for measuring heat, and a first signal line for transmitting a signal are arranged at regular intervals And a plurality of reference unit pixels having an effective pixel array for detecting a terahertz signal and an effective pixel array spaced apart from each other, and having a second bolometer for measuring heat and a second signal line for transmitting a signal, at a predetermined interval. It includes a reference pixel array as a reference for correcting the resistance deviation of the.
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