首页> 外国专利> METHOD AND DEVICE FOR GENERATING A PLASMA EXCITED BY MICROWAVE ENERGY IN THE ELECTRON CYCLOTRON RESONANCE (ECR) DOMAIN, IN ORDER TO CARRY OUT A SURFACE TREATMENT OR PRODUCE A COATING AROUND A FILIFORM ELEMENT.

METHOD AND DEVICE FOR GENERATING A PLASMA EXCITED BY MICROWAVE ENERGY IN THE ELECTRON CYCLOTRON RESONANCE (ECR) DOMAIN, IN ORDER TO CARRY OUT A SURFACE TREATMENT OR PRODUCE A COATING AROUND A FILIFORM ELEMENT.

机译：用于在电子回旋共振（ECR）域中产生由微波能量激发的等离子体的方法和装置，以进行表面处理或在丝状元件周围产生涂层。

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摘要

According to the method: the filiform element is continuously moved linearly through magnetic dipoles placed facing each other and around a tube forming a processing chamber; and the microwave energy is introduced between at least two magnetic dipoles.

机译：根据该方法：丝状元件通过彼此面对并围绕形成处理腔室的管子的磁偶极子连续地线性移动。微波能量被引入至少两个磁偶极子之间。

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公开/公告号MX360902B

专利类型
公开/公告日2018-11-21

原文格式PDF
申请/专利权人 H.E.F.;
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申请/专利号MX20160012991
发明设计人 OLIVIER BLANDENET;THIERRY LÉON LAGARDE;PATRICK CHOQUET;DAVID DUDAY;
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申请日2015-03-26
分类号G06F3/041;G06F3/0488;
国家 MX
入库时间 2022-08-21 12:01:41

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