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ECR METHOD AND DEVICE FOR GENERATING A PLASMA EXCITED BY MICROWAVE ENERGY IN THE ELECTRON CYCLOTRON RESONANCE ECR DOMAIN IN ORDER TO CARRY OUT A SURFACE TREATMENT OR PRODUCE A COATING AROUND A FILIFORM ELEMENT
ECR METHOD AND DEVICE FOR GENERATING A PLASMA EXCITED BY MICROWAVE ENERGY IN THE ELECTRON CYCLOTRON RESONANCE ECR DOMAIN IN ORDER TO CARRY OUT A SURFACE TREATMENT OR PRODUCE A COATING AROUND A FILIFORM ELEMENT
A process and apparatus for generating a plasma excited by microwave energy in an electron cyclotron resonance (ECR) region to perform a surface treatment or coating around a filiform element (F) is disclosed. According to the process: The mapping elements are arranged to face each other and are continuously and linearly moved through the magnetic dipole arranged around the tube constituting the processing chamber; Microwave energy is introduced between at least two magnetic dipoles.
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