Pressure Control Strategies to Provide Uniform Treatment Streams in the Manufacture of Microelectronic Devices

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  机译： 半导体晶片抛光方法例如用于制造微电子设备，可以通过独立调节抛光室的压力来对晶片进行单独处理

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  机译： 深接触压力感测装置的控制系统，制造方法和使用方法

• 5. CONTROL SYSTEM FOR DEEP TOUCH PRESSURE SENSORY TREATMENT DEVICES, METHOD OF MANUFACTURE AND METHOD OF USE [P] . 美国专利： US2016199248A1 . 2016-07-14

  机译： 深接触压力感测装置的控制系统，制造方法和使用方法

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• 10. Towards a Uniform Topological Treatment of Streams and Functions on Streams [R] . Debakker, J. W., Kok, J. N. 1984

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