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A method of manufacturing a rare earth powder or sputtering target containing neodymium, iron, boron as a main component, a powder composed of the rare earth element or a sputtering target, a thin film for a rare earth magnet mainly comprising neodymium, iron, boron or a method for producing the same
A method of manufacturing a rare earth powder or sputtering target containing neodymium, iron, boron as a main component, a powder composed of the rare earth element or a sputtering target, a thin film for a rare earth magnet mainly comprising neodymium, iron, boron or a method for producing the same
The present invention relates to a process for producing an alloy ingot by dissolving and casting a raw material mainly containing neodymium, iron, and boron in a vacuum to make an oxygen ingot concentration in an ingot 300 ppm or less, Iron and boron as main components, characterized in that the powder is finely pulverized by a gas atomization method using an active gas so that the concentration of oxygen contained in the powder is 500 ppm or less. In the preparation of a rare earth powder or a sputter target essentially consisting of neodymium, iron and boron, by reducing moisture adhering to the raw material and reducing the oxygen concentration in the target, it is possible to stabilize by the sputtering method or the pulsed laser deposition method It is possible to improve the magnetic characteristics of the rare earth magnet thin film and improve the productivity.
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