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DYNAMIC MEMS PRESSURE SENSOR MEMS AND / OR NEMS WITH IMPROVED PERFORMANCES AND MICROPHONE HAVING SUCH A SENSOR
DYNAMIC MEMS PRESSURE SENSOR MEMS AND / OR NEMS WITH IMPROVED PERFORMANCES AND MICROPHONE HAVING SUCH A SENSOR
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机译：动态MEMS压力传感器MEMS和/或NEMS具有改进的性能并且麦克风具有此类传感器
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摘要
Dynamic pressure sensor of the MEMS and / or NEMS type comprising a support (2) and a rigid sensitive element (4) anchored to the support (2) by at least one anchoring zone, said sensitive element (4) comprising a first and a second parallel face intended to be subjected to different pressures, said sensitive element (4) being able to have an out-of-plane displacement relative to the support (2) in a direction (Z) of detection under the effect of a pressure difference, the pressure sensor also comprising means for piezoresistive detection of a force applied to the sensitive element (4) by the pressure difference.
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