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ION-SENSITIVE FIELD-EFFECT TRANSISTOR (ISFET) WITH NANOSTRUCTURES AND FABRICATION METHOD THEREOF

机译:具有纳米结构的离子敏感场效应晶体管(ISFET)及其制造方法

摘要

Disclosed herein is an ion-sensitive field-effect transistor (ISFET) (100) having nanostructures (109) for sensing ions and measuring ion concentration in solutions. In general, the base layer (101) at the sensing region of the ISFET (100) is etched to form the nanostructures (109). Each of the nanostructures (109) has a diameter of less than 100nm, and the nanostructures (109) have a distance of less than 100nm from each other. The nanostructures (109) are nanopillars with cylindrical shape, needle-like shape, or a combination thereof. Due to all these particular features, the surface area of the ISFET (100) that is exposed to ions is increased, and therefore the sensitivity and efficiency of the ISFET (100) are improved. Also disclosed herein is a fabrication method thereof.
机译:本文公开了一种具有纳米结构(109)的离子敏感场效应晶体管(ISFET)(100),所述纳米结构用于感测离子并测量溶液中的离子浓度。通常,蚀刻ISFET(100)的感测区域处的基础层(101)以形成纳米结构(109)。每个纳米结构(109)具有小于100nm的直径,并且纳米结构(109)彼此之间的距离小于100nm。纳米结构(109)是具有圆柱形状,针状形状或其组合的纳米柱。由于所有这些特定特征,暴露于离子的ISFET(100)的表面积增加,因此ISFET(100)的灵敏度和效率得以提高。本文还公开了其制造方法。

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