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Beam profiler measuring intensity distribution of laser beam, laser oscillator, and laser processing device
Beam profiler measuring intensity distribution of laser beam, laser oscillator, and laser processing device
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机译:光束轮廓仪,用于测量激光束,激光振荡器和激光加工装置的强度分布
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摘要
A beam profiler which can determine whether or not a laser beam can be suitably output at a lower cost. The beam profiler is provided with a partial reflecting mirror, light receiving parts, and laser intensity sensors which are individually attached to the light receiving parts. The light receiving parts include a first light receiving part which receives a first region which includes an optical axis of the laser beam in a laser irradiation region of the laser beam and a second light receiving part which is insulated heat-wise from the first light receiving part and which receives a second region of a laser irradiation region which is different from the first region.
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