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RASPBERRY-TYPE METAL OXIDE NANOSTRUCTURES COATED WITH CEO2 NANOPARTICLES FOR CHEMICAL MECHANICAL PLANARIZATION (CMP)

机译：涂有CEO2纳米粒子的用于化学机械平面化（CMP）的树莓型金属氧化物纳米结构

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Raspberry-type coated particles comprising a core selected from the group consisting of metal oxides of Si, Ti, Zr, Al, Zn and mixtures thereof with a core size of from 20 to 100 nm wherein the core is coated with CeO₂particles having a particle size below 10 nm; process for preparing raspberry type coated particles comprising the steps ofi) providing a mixture containinga) core particles selected from the group of metal oxides of Si, Ti, Zr, Al, Zn and mixtures thereof, with a particle size of from 20 to 100 nm,b) a water soluble Ce-salt andc) water,ii) adding an organic or inorganic base to the mixture of step i) at temperatures of from 10 to 90° C. andiii) aging the mixture at temperatures of from 10 to 90° C.;and polishing agents containing the particles and their use for polishing surfaces (FIG. 1).

机译：覆盆子型涂覆的颗粒，其包含选自由Si，Ti，Zr，Al，Zn的金属氧化物及其混合物组成的组的核，其核尺寸为20至100 nm，其中该核被CeO 2覆盖粒径小于10 nm的颗粒;覆盆子型涂层颗粒的制备方法，包括以下步骤 i）提供包含 a）核心颗粒，其选自Si，Ti，Zr，Al，Zn的金属氧化物及其混合物，粒径为20至100 nm， b）水溶性铈盐和 c）水 ii）在10至90°C的温度下向步骤i）的混合物中添加有机或无机碱，并且 iii）将混合物在10至90℃的温度下老化;以及包含该颗粒的抛光剂及其在抛光表面中的用途（图 1 ）。 展开▼

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公开/公告号US2016280963A1

专利类型

公开/公告日2016-09-29

原文格式PDF

申请/专利权人 BASF SE;
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申请/专利号US201615177727

发明设计人 ZHIHUA ZHANG;VAIBHAV DALVI;BIR DARBAR MEHTA;ANDREAS FECHTENKOETTER;YUZHUO LI;MICHAEL LAUTER;
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申请日2016-06-09

分类号C09G1/02;C23C16/02;H01L21/306;C09K3/14;

国家 US

入库时间 2022-08-21 14:36:34

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