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Focal length measuring device and a microlens array
Focal length measuring device and a microlens array
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机译：焦距测量装置和微透镜阵列
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摘要
PROBLEM TO BE SOLVED: To provide a focal length measuring instrument and method of a microlens array, which is capable of measuring a focal length of a microlens array.;SOLUTION: A reticle pattern surface 31a of a reticle 31 is aligned with a focus position of a camera 20, and the camera 20 and the reticle 31 are fixed to each other by a holding tool 21. A mask 30 is irradiated with illuminating light from a transmissive illumination light source 22, and an image of a mask pattern 41 provided on a mask pattern surface 30a of the mask 30 is formed on the reticle pattern surface 31a by a microlens array 2. That is, the camera 20 and the reticle 31 are moved as one body to adjust the position of the reticle 31 so that images of the mask pattern 41 and a reticle pattern 40 are in-focus together on the reticle pattern surface 31a in the camera 20. A distance between the reticle pattern surface 31a and the mask pattern surface 30a is measured by laser displacement gauges 23 and 24 to obtain a focal length f of the microlens array 2.;COPYRIGHT: (C)2013,JPO&INPIT
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