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PIEZOELECTRICALLY-ACTUATED DEVICE, ROBOT AND DRIVING METHOD FOR PIEZOELECTRICALLY-ACTUATED DEVICE AND ROBOT
PIEZOELECTRICALLY-ACTUATED DEVICE, ROBOT AND DRIVING METHOD FOR PIEZOELECTRICALLY-ACTUATED DEVICE AND ROBOT
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机译:压电驱动装置,机器人及驱动方法
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摘要
PROBLEM TO BE SOLVED: To stabilize actuation characteristics of a piezoelectrically-actuated device by curbing unintended oscillation thereof.;SOLUTION: A piezoelectrically-actuated device (10) comprises: a first member (31); a second member (32); an oscillation plate (23) which is arranged between the first member (31) and the second member (32) and mounted with piezoelectric elements (210a to 210d and 250a to 250d); and third members (75 and 76) which are arranged between the oscillation plate (23) and the first member (31) and have a mechanical quality coefficient smaller than the same of the oscillation plate (23).;SELECTED DRAWING: Figure 5;COPYRIGHT: (C)2016,JPO&INPIT
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