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Material growth stages in the case of a variable temperature and thin film growth
Material growth stages in the case of a variable temperature and thin film growth
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机译:温度变化和薄膜生长情况下的材料生长阶段
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摘要
Material growth stages in the case of a variable temperature and thin film growth of a thin film of material on a substrate, in a continuous process of a physical gas phases deposition system is formed, with material during a growth step in the case of a variable temperature, which has a first phase, which is below a temperature of approximately 500°C. is carried out, is deposited, and wherein the material is deposited continuously, while the temperature for the second phase changes to approximately 800°C.
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