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Material growth stages in the case of a variable temperature and thin film growth

机译:温度变化和薄膜生长情况下的材料生长阶段

摘要

Material growth stages in the case of a variable temperature and thin film growth of a thin film of material on a substrate, in a continuous process of a physical gas phases deposition system is formed, with material during a growth step in the case of a variable temperature, which has a first phase, which is below a temperature of approximately 500°C. is carried out, is deposited, and wherein the material is deposited continuously, while the temperature for the second phase changes to approximately 800°C.
机译:在温度可变的情况下的材料生长阶段,以及在物理气相沉积系统的连续过程中,在基板上形成材料薄膜的薄膜生长,在变量变化的情况下,在生长步骤中形成材料第一相的温度低于约500°C的温度。进行,沉积,并且其中材料连续沉积,同时第二相的温度变为约800℃。

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