首页> 外国专利> Method for Producing Silicon Nanowire Using Porous Glass Template and Device Comprising Silicon Nanowire Formed by the Same

Method for Producing Silicon Nanowire Using Porous Glass Template and Device Comprising Silicon Nanowire Formed by the Same

机译:利用多孔玻璃模板生产硅纳米线的方法及由该方法形成的硅纳米线的装置

摘要

The present invention forms a silicon nanowire by a solid-liquid-solid (SLS) method or a vapor-liquid-solid (VLS) method using a porous glass template having nanometer-sized pores doped with erbium or erbium precursor The present invention also relates to a method of manufacturing a silicon nanowire and a device including the silicon nanowire formed by the method.;The silicon nanowire produced by the present invention can be applied to various fields such as an electronic device such as a field effect transistor (FET), a sensor, a photodetector, a light emitting diode (LED), and a laser diode (LD) . / RTI ;Porous glass template, erbium, silicon nanowire, linearity, device implementation
机译:本发明通过使用具有掺有or或or前体的纳米级孔的多孔玻璃模板通过固-液-固(SLS)方法或气-液-固(VLS)方法形成硅纳米线。本发明还涉及本发明生产的硅纳米线可以应用于各种领域,例如电子器件,例如场效应晶体管(FET),以及用于制造硅纳米线的方法和包括通过该方法形成的硅纳米线的器件。传感器,光电探测器,发光二极管(LED)和激光二极管(LD)。多孔玻璃模板,,硅纳米线,线性度,器件实现

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