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Apparatus and processes for silicon on insulator mems pressure sensors
Apparatus and processes for silicon on insulator mems pressure sensors
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机译：绝缘体上记忆硅压力传感器的设备和工艺
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摘要
System and methods for silicon on insulator MEMS pressure sensors are provided. In one embodiment, a method comprises: applying a doping source to a silicon-on-insulator (SOI) silicon wafer having a sensor layer and an insulating layer comprising SiO2 material; doping the silicon wafer with Boron atoms from the doping source while controlling an injection energy of the doping to achieve a top-heavy ion penetration profile; and applying a heat source to diffuse the Boron atoms throughout the sensor layer of the SOI silicon wafer.
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