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METHOD AND APPARATUS FOR RELEASE-ASSISTED MICROCONTACT PRINTING OF MEMS

机译:释放释放的MEMS微接触印刷的方法和装置

摘要

The disclosure provides methods and apparatus for release-assisted microcontact printing of MEMS. Specifically, the principles disclosed herein enable patterning diaphragms and conductive membranes on a substrate having articulations of desired shapes and sizes. Such diaphragms deflect under applied pressure or force (e.g., electrostatic, electromagnetic, acoustic, pneumatic, mechanical, etc.) generating a responsive signal. Alternatively, the diaphragm can be made to deflect in response to an external bias to measure the external bias/phenomenon. The disclosed principles enable transferring diaphragms and/or thin membranes without rupturing.
机译:本公开提供了用于MEMS的释放辅助微接触印刷的方法和设备。具体地,本文公开的原理使得能够在具有期望形状和尺寸的关节的基板上对隔膜和导电膜进行构图。这样的膜片在施加的压力或力(例如,静电,电磁,声,气动,机械等)下偏转,从而产生响应信号。可替代地,可以使膜片响应于外部偏压而偏转以测量外部偏压/现象。公开的原理使得能够在不破裂的情况下转移隔膜和/或薄膜。

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