MEMS Device with Sealed Cavity and Release Chamber and Related Double Release Method

• 1. 具有双侧药物释放性能的体内管腔内支架及其制备方法 [P] . 中国专利： CN101810889B . 2013.01.09
• 2. 具有双侧药物释放性能的体内管腔内支架及其制备方法 [P] . 中国专利： CN101810889A . 2010-08-25
• 3. MEMS device with sealed cavity and release chamber and related double release method [P] . 美国专利： US9272901B2 . 2016-03-01

  机译： 具有密封腔和释放腔的MEMS装置以及相关的双重释放方法

• 4. Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation [P] . 美国专利： US7008812B1 . 2006-03-07

  机译： 使用干燥释放的MEMS器件封装在密封腔中制造MEMS结构

• 5. MANUFACTURE OF MEMS STRUCTURES IN SEALED CAVITY USING DRY-RELEASE MEMS DEVICE ENCAPSULATION [P] . 世界知识产权组织专利： WO0192842A3 . 2002-06-06

  机译： 利用干式释放MEMS器件封装制造密封腔中的MEMS结构

• 1. Closed form solution of stress intensity factors for cracks emanating from surface semi-spherical cavity in finite body with energy release rate method [J] . Hualiang WAN, Qizhi WANG, Xing ZHANG 应用数学和力学（英文版） . 2016,第012期
• 2. The Collapse Intensity of Cavities and the Concentration of Free Hydroxyl Radical Released in Cavitation Flow [J] . 张晓冬, 付勇, 李志义, 中国化学工程学报：英文版 . 2008,第004期
• 3. Occurrence and influence of residual gas released by crush methods on pore structure in Longmaxi shale in Yangtze Plate, Southern China [J] . Ming-liang Liang, Zong-xiu Wang, Guo-dong Zheng, 中国地质（英文） . 2020,第004期
• 4. Occurrence and influence of residual gas released by crush methods on pore structure in Longmaxi shale in Yangtze Plate, Southern China [J] . Ming-liang Liang, Zong-xiu Wang, Guo-dong Zheng, 中国地质(英文) . 2020,第004期
• 5. The indent reflow sealing (IRS) technique-a method for the fabrication of sealed cavities for MEMS devices [J] . Tilmans H.A.C., van de Peer D.J. Journal of Microelectromechanical Systems . 2000,第2期
• 6. Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis [J] . Yuki Okamoto, Eric Lebrasseur, Isao Mori, IEEE Transactions on Semiconductor Manufacturing . 2017,第3期
• 7. Development of the one-step DRIE dry process for unconstrained fabrication of released MEMS devices [J] . Docker PT, Kinnell PK, Ward MCL Journal of Micromechanics and Microengineering . 2004,第7期
• 8. Modulate the chamber pressure of the hermetic sealed MEMS device by varying the cavity depth of cap Si [C] . Shyh-Wei Cheng, Jui-Chun Weng, His-Cheng Hsu, IEEE Sensors . 2016
• 9. An effective method for developing medical devices from research and development to market release. [D] . Nguyen, Brian Xuan Vu. 2003
• 10. Emission Rates of Volatile Organic Compounds Released from Newly Produced Household Furniture Products Using a Large-Scale Chamber Testing Method [O] . Duy Xuan Ho, Ki-Hyun Kim, Jong Ryeul Sohn, 2011
• 11. Devices and methods to measure H2 and CO2 concentrations in gases released from soils and low temperature fumaroles in volcanic areas [O] . Di Martino RMR, Camarda M, Gurrieri S, 2009
• 12. Aerospace Sensor Component and Subsystem Investigation and Innovation-2 Component Exploration and Development (ASCSII-2 CED) Delivery Order 0003: Hermetically Sealed Cavities in 3-D GaAs-Silicon and Silicon-Silicon Packages for Microelectromechanical System (MEMS) Devices Using Selective and Large-Scale Bonding [R] . Malshe, A. P. 2003

• 1. Pore Characteristics and Gas Released by Crush Methods of Wufeng-Longmaxi Shale in the Northwest of Hubei Province,China [J] . WANG Qingtao ,SHEN Chenchen ,CHEN Qing . 地质学报：英文版 . 2015,第A01期
• 2. 干气密封端面间隙及密封腔流场数值模拟 [C] . 顾灿鸿 ,陈志 ,赵鹏 . 第十五届全国高等学校过程装备与控制工程专业教学与科研校际交流会 . 2017
• 3. 在FLASH装置上1.3GHz超导加速腔内的基于高阶模的束团和加速腔诊断方法研究 [A] . 韦隽昊 . 2020