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IMAGE ACQUISITION METHOD BY COHERENT DIFFRACTION MICROSCOPE, AND COHERENT DIFFRACTION MICROSCOPE SYSTEM
IMAGE ACQUISITION METHOD BY COHERENT DIFFRACTION MICROSCOPE, AND COHERENT DIFFRACTION MICROSCOPE SYSTEM
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机译：相干衍射显微镜的图像采集方法及相干衍射显微镜系统
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摘要
PROBLEM TO BE SOLVED: To provide an image acquisition method by a coherent diffraction microscope that quickly and highly accurately recovers a phase of a diffraction wave, and enables acquisition of a real image of a specimen.;SOLUTION: An image acquisition method by a coherent diffraction microscope is configured to: dispose a reference object on a plane in the vicinity of a specimen; irradiate the reference object with an irradiation wave from a coherent light source or a coherent particle beam source; obtain intensity of diffraction waves detected from the specimen and the reference object; and recover a phase of the diffraction wave to acquire a real image of the specimen. The reference object includes a configuration in which a two-dimensional scattering power distribution projecting the scattering power of the reference object to the irradiation wave on a plane has an odd rotational symmetry to a rotation at an angle of 2π/n with n set as an odd number of 3 or more. Let the intensity of the diffraction wave detected from the specimen and the reference object is denoted as I, a phase of a complex function obtained through Fourier transformation to an image of the reference object is denoted as f, and an approximate image of the specimen is denoted as H0, then the real image of the specimen is acquired so as to satisfy H0=I1/2exp(iφ).;COPYRIGHT: (C)2015,JPO&INPIT
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