首页> 外国专利> DEVICE FOR GENERATING A PLASMA HAVING A SIGNIFICANT EXTEND ALONG AN AXIS BY ELECTRONIC CYCLOTRONIC RESONANCE RCE FROM A GASEOUS MEDIUM

DEVICE FOR GENERATING A PLASMA HAVING A SIGNIFICANT EXTEND ALONG AN AXIS BY ELECTRONIC CYCLOTRONIC RESONANCE RCE FROM A GASEOUS MEDIUM

机译:通过气态电子回旋共振RCE产生沿轴延伸显着的等离子体的装置

摘要

The device comprises at least two coaxial waveguides (4) each consisting of a central conductor (1) and an outer conductor (2) for feeding microwaves into a treatment chamber, characterized in that at least the two electromagnetic wave injection guides (4) are combined with a magnetic circuit (21-22) elongated in one direction, said magnetic circuit surrounding the waveguides (4) creating a magnetic field capable of performing an ECR condition near said waveguides.
机译:该装置包括至少两个同轴波导(4),每个同轴波导由中央导体(1)和外部导体(2)组成,用于将微波馈送到治疗室,其特征在于,至少两个电磁波注入导轨(4)结合在一个方向上延伸的磁路(21-22),围绕着波导(4)的所述磁路产生能够在所述波导附近执行ECR条件的磁场。

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