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DEVICE FOR GENERATING A PLASMA HAVING A SIGNIFICANT EXTEND ALONG AN AXIS BY ELECTRONIC CYCLOTRONIC RESONANCE RCE FROM A GASEOUS MEDIUM
DEVICE FOR GENERATING A PLASMA HAVING A SIGNIFICANT EXTEND ALONG AN AXIS BY ELECTRONIC CYCLOTRONIC RESONANCE RCE FROM A GASEOUS MEDIUM
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机译:通过气态电子回旋共振RCE产生沿轴延伸显着的等离子体的装置
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摘要
The device comprises at least two coaxial waveguides (4) each consisting of a central conductor (1) and an outer conductor (2) for feeding microwaves into a treatment chamber, characterized in that at least the two electromagnetic wave injection guides (4) are combined with a magnetic circuit (21-22) elongated in one direction, said magnetic circuit surrounding the waveguides (4) creating a magnetic field capable of performing an ECR condition near said waveguides.
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