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Simulator of the prediction method and the ion irradiation damage of ion irradiation damage, and ion irradiation apparatus and ion irradiation method
Simulator of the prediction method and the ion irradiation damage of ion irradiation damage, and ion irradiation apparatus and ion irradiation method
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机译：离子照射损伤的预测方法和离子照射损伤的模拟器，离子照射装置和离子照射方法
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摘要
PROBLEM TO BE SOLVED: To provide a technique for feeding back damage distribution computation owing to ion radiation in a real pattern and process such as 100 nm scale to the process development of a device within realistic computation time such as several hours or several days.;SOLUTION: An ion radiation damage prediction method includes: a parameter computation step of computing the collision location and the incidence angle of an incident ion hitting a fabricated object by considering a transport path of the ion by adopting the Monte Carlo method; and a defect-distribution computation step of searching for data by referring information obtained at the parameter computation step and databases storing crystalline-defect-amount affected on the fabricated object prepared by molecular dynamics computation, ion reflection probabilities and ion penetration length distribution, obtaining the penetration depth and location of the incident ion based on the searched data and the incidence energy and angle of the incident ion, and obtaining a distribution of defects due to ion radiation generated in the fabricated object.;COPYRIGHT: (C)2011,JPO&INPIT
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