PROBLEM TO BE SOLVED: To provide an electrostatic comb-shaped actuator that is large in a displacement amount of a movable portion and high in a strength of a connection portion in an electrode separation groove, and a device using the same.;SOLUTION: An actuator 100 is formed on a substrate 101 that includes a handle layer 102, an elastic layer 103, and an insulating layer 104. The actuator includes: a movable portion 108 supported by a support portion 101b by means of an elastic body 109; a movable comb-shaped electrode 105 formed on the movable portion; a fixed comb-shaped electrode 106 supported by a support portion 101a; and electrode interconnecting wires 122 and 123 connected to the comb-shaped electrodes, respectively. The elastic body supports the movable portion displaceably in a substrate perpendicular direction, and the movable portion is displaced in response to a voltage applied to the comb-shaped electrodes. Each of the comb-shaped electrodes is constituted by the handle layer, and the elastic body is constituted by the elastic layer. A handle-layer separation groove 111 electrically separating the handle layers of the support portions supporting the respective comb-shaped electrodes is provided, and an insulating structure reinforcing portion 112 is provided to extend over the separation groove.;COPYRIGHT: (C)2014,JPO&INPIT
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