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DEVICE FOR MEASURING MEAN FREE PATH, VACUUM GAUGE, AND METHOD FOR MEASURING MEAN FREE PATH

机译：用于测量平均自由程的装置，真空计以及用于测量平均自由程的方法

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摘要

measuring apparatus of the present invention is the mean free path , which can directly measure the mean free path of the charged particle and provides a method of measuring the vacuum system and the mean free path . The mean free path of the measuring device according to an embodiment of the present invention may be of the charged particles of the first charged particles having the ion source , the ion source from the zero or more flight distance of the first flight distance (L1) for generating an ion includes the collector (24b) for detecting the number of collectors (24a) and the second charged particles having a long flight distance than the second for detecting the first fly . The control of the device is calculated from the ratio of the mean free path between the first and the second number of charged particles . ;

机译：本发明的测量装置是平均自由程，它可以直接测量带电粒子的平均自由程，并提供了一种测量真空系统和平均自由程的方法。根据本发明的实施例的测量装置的平均自由程可以是具有离子源的第一带电粒子中的带电粒子，该离子源来自第一飞行距离（L1）的零个或多个飞行距离。用于产生离子的装置包括用于检测收集器（24a）的数量的收集器（24b）和比用于检测第一蝇的第二带电粒子具有长的飞行距离的第二带电粒子。根据第一和第二个带电粒子数之间的平均自由程之比来计算设备的控制量。 ;

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公开/公告号KR101296275B1

专利类型
公开/公告日2013-08-14

原文格式PDF
申请/专利权人
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申请/专利号KR20127009379
发明设计人 나카무라 메구미;시오카와 요시로;펑 치앙;
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申请日2010-09-01
分类号G01L21/32;H01L21/203;H01L21/66;
国家 KR
入库时间 2022-08-21 16:24:41

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