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Device for measuring mean free path, vacuum gauge, and method for measuring mean free path
Device for measuring mean free path, vacuum gauge, and method for measuring mean free path
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机译：用于测量平均自由程的装置，真空计以及用于测量平均自由程的方法
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摘要
The present invention provides a device for measuring a mean free path capable of measuring directly the mean free path of a charged particle, a vacuum gauge, and a method for measuring a mean free path. The device for measuring a mean free path according to one embodiment of the invention includes an ion source for generating an ion, a collector (24a) for detecting the number of first charged particles being charged particles having a first flight distance L1 that is a flight distance of zero or more from the ion source, and a collector (24b) for detecting the number of second charged particles having a second flight distance longer than the first flight distance. The control part of the device calculates the mean free path from a ratio between the numbers of the first and second charged particles.
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机译：本发明提供了一种能够直接测量带电粒子的平均自由程的用于测量平均自由程的装置，一种真空计以及一种用于测量平均自由程的方法。根据本发明的一个实施例的用于测量平均自由程的装置包括用于产生离子的离子源，用于检测第一数量的收集器（ 24 a ）。带电粒子是具有距离子源的零距离或更大的第一飞行距离L 1 和收集器（ 24 b < / I>），以检测第二飞行距离长于第一飞行距离的第二带电粒子的数量。装置的控制部分根据第一和第二带电粒子的数量之间的比率计算平均自由程。
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