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METHODS FOR IN-SITU GENERATION OF REACTIVE ETCH AND GROWTH SPECIE IN FILM FORMATION PROCESSES
METHODS FOR IN-SITU GENERATION OF REACTIVE ETCH AND GROWTH SPECIE IN FILM FORMATION PROCESSES
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机译:膜形成过程中原位生成反应性刻蚀和生长物种的方法
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摘要
substrate in the reaction chamber for the process to metastable species for the formation and use a method and apparatus are disclosed . Metastable species during treatment of the substrate - situ deposition process may be used to etch the surface of the substrate in the ;
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