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REAL-TIME TERAHERTZ SPECTROSCOPIC IMAGING SYSTEM

机译:实时TERAHERTZ光谱成像系统

摘要

The present invention for the materials of the present invention is the spectral position for each of the samples using the terahertz wave measurement unit for measuring the data, the real-time processing the spectral data obtained from the measurement section to implement the video-part image of the sample on the basis of the data processor and the processed data to identify the location of each substance in the sample in the terahertz spectral image system relates. According to the present invention, high-speed and real-time terahertz imaging THz spectral imaging spectral data for each location in the sample as a method that combines the advantages of a high speed acquisition and processing of the material it is possible to identify the location of each of the samples in real-time Since the semiconductor process, failure of product inspection, non-destructive testing, security screening, as well as the advantage of a variety of biomedical diagnostics can be used in many areas such as. ;
机译:用于本发明材料的本发明是使用太赫兹波测量单元测量数据的每个样品的光谱位置,实时处理从测量部分获得的光谱数据以实现视频部分图像在数据处理器和处理过的数据的基础上确定样品中每种物质的位置,以识别太赫兹光谱图像系统中样品中每种物质的位置。根据本发明,样品中每个位置的高速和实时太赫兹成像THz光谱成像光谱数据是一种结合了高速采集和处理材料优点的方法,可以识别位置实时地对每个样本进行采样自半导体工艺以来,可以在许多领域中使用诸如产品检验失败,无损检测,安全检查以及各种生物医学诊断的优势。 ;

著录项

  • 公开/公告号KR101065496B1

    专利类型

  • 公开/公告日2011-09-19

    原文格式PDF

  • 申请/专利权人 YEE DAE SU;

    申请/专利号KR20100024158

  • 发明设计人 YEE DAE SU;

    申请日2010-03-18

  • 分类号G01N21/35;H01L21/66;G01J3/28;

  • 国家 KR

  • 入库时间 2022-08-21 17:49:47

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