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REAL-TIME TERAHERTZ SPECTROSCOPIC IMAGING SYSTEM
REAL-TIME TERAHERTZ SPECTROSCOPIC IMAGING SYSTEM
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机译：实时TERAHERTZ光谱成像系统
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摘要
A real-time terahertz spectroscopic imaging system is provided to be safer in comparison with an X-ray or a laser so as to be variously applied to semiconductor process, failure inspection of products, non-destructive inspection, and security search or bio-medicine diagnosis. A real-time terahertz spectroscopic imaging system includes a measuring unit(100), a data processing unit(200), and an imaging unit(300). The measuring unit has a light source(10) for generating light, a beam splitter(20) for splitting the light into two, a delay line(30) for delaying one of the split light, a terahertz generator(40), a polarizer(52) for passing the other split light from the beam splitter, and a high-speed electronic signal processing device(90). The data processing unit reads the information on materials based on the data of the electronic signal processing device and the data from the delay line. The imaging unit takes images of material of each position at a sample in the data processing unit.
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