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Production process for producing semiconductor devices, semiconductor devices produced thereby, and test system for carrying out yield-rate test in production of such semiconductor devices

机译:用于生产半导体器件的生产工艺,由此生产的半导体器件以及用于在这种半导体器件的生产中进行成品率测试的测试系统

摘要

In a production process for producing a plurality of semiconductor devices on chip areas (12) which are defined on a wafer (10), the wafer is processed such that each of the chip areas is produced as a semi-finished semiconductor device by forming a first wiring-arrangement section (16) on each of the chip areas. The wafer is subjected to a provisional yield-rate test in which it is examined whether each of the semi-finished semiconductor devices on the wafer is acceptable or unacceptable to calculate a yield-rate of acceptable semi-finished semiconductor devices. When the wafer passes the provisional yield-rate test, the wafer is further processed such that each of the chip areas is produced as a finished semiconductor device by forming a second wiring-arrangement section (48) on the first wiring-arrangement section.
机译:在用于在晶片(10)上限定的芯片区域(12)上生产多个半导体器件的生产过程中,对晶片进行处理,使得每个芯片区域通过形成半导体晶片而作为半成品半导体器件生产。每个芯片区域上的第一布线布置部分(16)。对晶片进行临时成品率测试,其中检查晶片上的每个半成品半导体器件是可接受的还是不可接受的,以计算可接受的半成品半导体器件的产率。当晶片通过临时合格率测试时,通过在第一配线布置部分上形成第二配线布置部分(48)来进一步处理晶片,使得每个芯片区域被制造为完成的半导体器件。

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