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SRAM device structure including same band gap transistors having gate stacks with high-K dielectrics and same work function

机译:SRAM器件结构,包括具有带高K电介质和相同功函数的栅极叠层的相同带隙晶体管

摘要

An SRAM semiconductor device includes: at least a first and a second field effect transistor formed on a same substrate, each of the transistors including a gate stack, each gate stack including a semiconductor layer disposed on a metal layer, the metal layer being disposed on a high-k dielectric layer located over a chemical region, wherein the metal layer of the first gate stack and the metal layer of the second gate stack have approximately a same work function, and wherein each channel region has approximately a same band gap.
机译:SRAM半导体器件包括:至少第一和第二场效应晶体管,其形成在同一衬底上,每个晶体管包括栅极叠层,每个栅极叠层包括设置在金属层上的半导体层,该金属层设置在金属层上。在化学区域上方的高k介电层,其中第一栅极堆叠的金属层和第二栅极堆叠的金属层具有大约相同的功函数,并且其中每个沟道区域具有大约相同的带隙。

著录项

  • 公开/公告号US7728392B2

    专利类型

  • 公开/公告日2010-06-01

    原文格式PDF

  • 申请/专利权人 HAINING S. YANG;ROBERT C. WONG;

    申请/专利号US20080968898

  • 发明设计人 HAINING S. YANG;ROBERT C. WONG;

    申请日2008-01-03

  • 分类号H01L27/088;

  • 国家 US

  • 入库时间 2022-08-21 18:49:11

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