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Raised photodiode sensor to increase fill factor and quantum efficiency in scaled pixels

机译:凸起的光电二极管传感器可提高比例像素的填充系数和量子效率

摘要

An image pixel cell with a doped, hydrogenated amorphous silicon photosensor, raised above the surface of a substrate is provided. Methods of forming the raised photosensor are also disclosed. Raising the photosensor increases the fill factor and the quantum efficiency of the pixel cell. Utilizing hydrogenated amorphous silicon decreases the leakage and barrier problems of conventional photosensors, thereby increasing the quantum efficiency of the pixel cell. Moreover, the doping of the photodiode with inert implants like fluorine or deuterium further decreases leakage of charge carriers and mitigates undesirable hysteresis effects.
机译:提供了一种具有掺杂的氢化非晶硅光电传感器的图像像素单元,该图像像素单元升高到基板表面上方。还公开了形成凸起的光电传感器的方法。提高光电传感器可以提高像素单元的填充系数和量子效率。利用氢化非晶硅减少了常规光电传感器的泄漏和势垒问题,从而提高了像素单元的量子效率。此外,用诸如氟或氘的惰性注入对光电二极管进行掺杂进一步减小了电荷载流子的泄漏并减轻了不希望的磁滞效应。

著录项

  • 公开/公告号US7649201B2

    专利类型

  • 公开/公告日2010-01-19

    原文格式PDF

  • 申请/专利权人 CHANDRA MOULI;

    申请/专利号US20060399372

  • 发明设计人 CHANDRA MOULI;

    申请日2006-04-07

  • 分类号H01L31/06;

  • 国家 US

  • 入库时间 2022-08-21 18:49:43

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