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Raised photodiode sensor to increase fill factor and quantum efficiency in scaled pixels
Raised photodiode sensor to increase fill factor and quantum efficiency in scaled pixels
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机译:凸起的光电二极管传感器可提高比例像素的填充系数和量子效率
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摘要
An image pixel cell with a doped, hydrogenated amorphous silicon photosensor, raised above the surface of a substrate is provided. Methods of forming the raised photosensor are also disclosed. Raising the photosensor increases the fill factor and the quantum efficiency of the pixel cell. Utilizing hydrogenated amorphous silicon decreases the leakage and barrier problems of conventional photosensors, thereby increasing the quantum efficiency of the pixel cell. Moreover, the doping of the photodiode with inert implants like fluorine or deuterium further decreases leakage of charge carriers and mitigates undesirable hysteresis effects.
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