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TEM SAMPLE PREPARATION METHOD, TEM SAMPLE, AND THIN SECTION SAMPLE
TEM SAMPLE PREPARATION METHOD, TEM SAMPLE, AND THIN SECTION SAMPLE
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机译：TEM样品制备方法，TEM样品和薄截面样品
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摘要
PROBLEM TO BE SOLVED: To fix a thin section sample on a sample holder without tilting a stage and to efficiently prepare a TEM sample in a shorter time with increasing throughput.;SOLUTION: The TEM sample preparation method prepares a TEM sample 1 by fixing a thin section sample 2 to a sample holder 3 after taking out the thin section sample from a sample S disposed on a stage, in which the method comprises a step of preparing the thin section sample formed integrally from a thin section body 2a formed into a rectangular shape in plan view and a projection part 2b projecting laterally from a part of side face of the thin section body by perforating the sample by etching processing using a focused ion beam; a step of moving the thin section sample to near the sample holder; a step of contacting the thin section sample with the sample holder so that the projection part contacts with the surface of the sample holder; and a step of fixing the projection part and the sample holder by a deposition film D by irradiating around the projection part with a focused ion beam while supplying raw material gas around the projection.;COPYRIGHT: (C)2010,JPO&INPIT
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