Photoresists for EUV based on photonic crystals

• 1. 一种基于双层光刻胶的光子晶体闪烁体制备方法 [P] . 中国专利： CN108062000B . 2020.07.28
• 2. 一种基于双层光刻胶的光子晶体闪烁体制备方法 [P] . 中国专利： CN108062000A . 2018-05-22
• 3. Photonic crystal EUV photoresists [P] . 美国专利： US7892719B2 . 2011-02-22

  机译： 光子晶体EUV光刻胶

• 4. PHOTONIC CRYSTAL EUV PHOTORESISTS [P] . 世界知识产权组织专利： WO2008055110A3 . 2008-07-24

  机译： 光子晶体EUV光致抗蚀剂

• 5. PHOTONIC CRYSTAL EUV PHOTORESISTS [P] . 世界知识产权组织专利： WO2008055110A2 . 2008-05-08

  机译： 光子晶体EUV光致抗蚀剂

• 1. Heart-on-chips screening based on photonic crystals [J] . Yixuan Shang, Zhuoyue Chen, Zhuohao Zhang, 生物设计与制作(英文) . 2020,第003期
• 2. Water as a Colorful Ink： Transparent, Rewritable Photonic Coatings Based on Colloidal Crystals Embedded in Chitosan Hydrogel [J] . 中国科学院院刊：英文版 . 2015,第002期
• 3. Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: Towards applications as EUV photoresists [J] . Kirsten Lawrie, Idriss Blakey, James Blinco Radiation Physics and Chemistry . 2011,第2期
• 4. Mechanistic insights in Zr- and Hf-based molecular hybrid EUV photoresists [J] . Lianjia Wu, Milos Baljozovic, Giuseppe Portale, Journal of microanolithography, MEMS, and MOEMS . 2019,第1期
• 5. Stability studies on a sensitive EUV photoresist based on zinc metal oxoclusters [J] . Neha Thakur, Li-Ting Tseng, Michaela Vockenhuber, Journal of microanolithography, MEMS, and MOEMS . 2019,第4期
• 6. Liquid crystal modified photonic crystal fiber (LC-PCF) fabricated with an SU-8 photoresist sealing technique for electrical flux measurement [C] . Shu-Ming Kuo, Yu-Wen Huang, Ssu-Ming Yeh, Micro Electro Mechanical Systems (MEMS), 2010 . 2010
• 7. Fabrication of three-dimensional photonic crystals via direct laser writing in an all-inorganic photoresist. [D] . Wong, Sean Hang Edmond. 2005
• 8. Molecular Modeling of EUV Photoresist Revealing the Effect of Chain Conformation on Line-Edge Roughness Formation [O] . Juhae Park, Sung-Gyu Lee, Yannick Vesters, 2019
• 9. Stability studies on a sensitive EUV photoresist based on zinc metal oxoclusters [O] . Neha Thakur, Li-Ting Tseng, Michaela Vockenhuber, 2019
• 10. Influence of Base and PAG on Deprotection Blur in EUV Photoresists and Some Thoughts on Shot Noise [R] . Jones, J., Anderson, C., Naulleau, P., 2008

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• 2. Heart?on?chips screening based on photonic crystals [J] . Yixuan Shang ,Zhuoyue Chen ,Zhuohao Zhang . 生物设计与制造 . 2020,第003期
• 3. Germanium Based Two-Dimensional Photonic Crystals: The Hexagonal and Honeycomb Lattices [J] . Fairuz Aniqa Salwa ,Muhammad Mominur Rahman ,Muhammad Obaidur Rahman . 光学与光子学期刊（英文） . 2019,第3期
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