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CERAMIC FLAME SPRAY COATING MEMBER, METHOD FOR PRODUCING THE SAME AND POLISHING MEDIA FOR CERAMIC FLAME SPRAY COATING MEMBER
CERAMIC FLAME SPRAY COATING MEMBER, METHOD FOR PRODUCING THE SAME AND POLISHING MEDIA FOR CERAMIC FLAME SPRAY COATING MEMBER
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机译:陶瓷火焰喷涂构件,陶瓷火焰喷涂构件的制造方法及抛光介质
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摘要
A ceramic flame spray coating member, a method for producing the same and polishing media for the ceramic flame spray coating member are provided to produce product using halogen plasma including a semiconductor steadily and reduce the particle contamination level of a wafer. A ceramic flame spray coating member comprises a ceramic spraying film formed at a substrate surface. The ceramics consists of alumina, YAG, zirconia, yttrium oxide, scandium oxide, lanthanide oxide fluorinate yttrium, the scandium fluoride, and lanthanide fluoride or the compound. The ceramic spraying member is used in the inside of a plasma processing device. The manufacturing method of the ceramic spraying member comprises: a step performing the ceramic spraying in a substrate surface and a step of removing a splat(4) of the sprayed film surface.
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