首页> 外国专利> CERAMIC FLAME SPRAY COATING MEMBER, METHOD FOR PRODUCING THE SAME AND POLISHING MEDIA FOR CERAMIC FLAME SPRAY COATING MEMBER

CERAMIC FLAME SPRAY COATING MEMBER, METHOD FOR PRODUCING THE SAME AND POLISHING MEDIA FOR CERAMIC FLAME SPRAY COATING MEMBER

机译:陶瓷火焰喷涂构件,陶瓷火焰喷涂构件的制造方法及抛光介质

摘要

A ceramic flame spray coating member, a method for producing the same and polishing media for the ceramic flame spray coating member are provided to produce product using halogen plasma including a semiconductor steadily and reduce the particle contamination level of a wafer. A ceramic flame spray coating member comprises a ceramic spraying film formed at a substrate surface. The ceramics consists of alumina, YAG, zirconia, yttrium oxide, scandium oxide, lanthanide oxide fluorinate yttrium, the scandium fluoride, and lanthanide fluoride or the compound. The ceramic spraying member is used in the inside of a plasma processing device. The manufacturing method of the ceramic spraying member comprises: a step performing the ceramic spraying in a substrate surface and a step of removing a splat(4) of the sprayed film surface.
机译:本发明提供一种陶瓷火焰喷涂构件,其制造方法以及用于该陶瓷火焰喷涂构件的抛光介质,以稳定地使用包括半导体的卤素等离子体来生产产品,并降低晶片的颗粒污染水平。陶瓷火焰喷涂构件包括形成在基板表面上的陶瓷喷涂膜。陶瓷由氧化铝,YAG,氧化锆,氧化钇,氧化scan,氧化镧氟化氟钇,氟化the和氟化镧或这些化合物组成。陶瓷喷涂构件用于等离子体处理装置的内部。陶瓷喷涂构件的制造方法包括:在基板表面上进行陶瓷喷涂的步骤和去除喷涂膜表面的splat(4)的步骤。

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