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MICROFORCE SENSOR, PARTICULARLY FOR CMM AND AFM APPLICATIONS
MICROFORCE SENSOR, PARTICULARLY FOR CMM AND AFM APPLICATIONS
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机译：微力传感器，特别适用于CMM和AFM应用
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摘要
The invention relates to a microforce sensor (18) with three degrees of freedom, comprising a retaining element (19) and a straight bar (21) with a front end (21a) used for measurement, said sensor being suspended in the retaining element (19) by two pairs of support beams (24 to 27) extending transversely to the bar (21) and configured in an elastic manner such that the front end (21a) thereof may be displaced in three directions (x, y, z). Each support beam (24 to 27) is configured in an elastic manner and has one end connected to the retaining element (19) in a fixed manner and one end connected to the bar (21) in a fixed manner, wherein piezoresistive sensors are integrated into the bar and into the support beams.
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