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首页> 外文期刊>International Journal of Information Acquisition >INFINITE DIMENSION MODELING OF A NOVEL MICROFORCE SENSOR AND THE APPLICATION IN MICROMANIPULATION
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INFINITE DIMENSION MODELING OF A NOVEL MICROFORCE SENSOR AND THE APPLICATION IN MICROMANIPULATION

机译：新型微力传感器的三维建模及其在微操纵中的应用

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摘要

To accurately measure the micro-interactive force (for example, adhesion, surface tension, friction, and assembly force) acting on microdevices during microano manipulation, a novel microforce sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this study. During the application of this microforce sensor in microano manipulation, the accuracy of this sensor's model is quite important to the force control of the system. Therefore, the accurate infinite dimension model of the microforce sensor and micromanipulator is built up. Based on the infinite dimension model, the impedance control system is designed. To verify the infinite dimension model and the control system, micromanipulation experiments are designed and realized. Experiment results verify the accuracy of the infinite dimension model of the sensor and show the efficiency of the impedance control system. The developed microforce sensor and the infinite dimension modeling provide a feasible and versatile solution in microforce sensing and feedback force control for microano manipulation, and will promote the technology of automating the microano manipulation.
机译：为了精确地测量在微/纳米操作过程中作用在微设备上的微相互作用力（例如，附着力，表面张力，摩擦和装配力），新型的微力传感器可以可靠地测量亚微牛顿范围内的力（μN）是在本研究中设计和开发的。在将微力传感器应用于微/纳米操纵过程中，该传感器模型的准确性对于系统的力控制非常重要。因此，建立了微力传感器和微操纵器的精确无限尺寸模型。基于无穷大模型，设计了阻抗控制系统。为了验证无穷大模型和控制系统，设计并实现了微操纵实验。实验结果验证了传感器无限尺寸模型的准确性，并证明了阻抗控制系统的效率。所开发的微力传感器和无限尺寸建模为微/纳米操纵的微力传感和反馈力控制提供了一种可行且通用的解决方案，并将推动自动化微/纳米操纵的技术。

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  • 来源
    《International Journal of Information Acquisition》 |2010年第4期|p.299-307|共9页
  • 作者

    YIYANG LIU; YUECHAO WANG; PENG YU; ZAILI DONG;

  • 作者单位

    State Key Laboratory of RoboticsShenyang Institute of Automation Chinese Academy of Sciences, P. R. China,Graduate School of the Chinese Academy of Sciences, P. R. China;

    State Key Laboratory of RoboticsShenyang Institute of Automation Chinese Academy of Sciences, P. R. China;

    State Key Laboratory of RoboticsShenyang Institute of Automation Chinese Academy of Sciences, P. R. China;

    State Key Laboratory of RoboticsShenyang Institute of Automation Chinese Academy of Sciences, P. R. China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    micromanipulation; microforce; sensor; infinite dimension;

    机译：显微操作微力传感器;无限维;

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