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Preparation method of ZnO nanorods and nanorods made by the same

机译:ZnO纳米棒的制备方法及由其制备的纳米棒

摘要

A method for preparing ZnO nanobars through a hydrothermal process or lithographic process is provided to produce large-area ZnO nanobars at a low temperature, to allow control of the growth of ZnO nanobars, and to permit alignment of nanobars in a desired position on a substrate. A method for preparing ZnO nanobars comprises the steps of: (a) coating a buffer layer on a substrate; (b) dipping the substrate coated with the buffer layer into an aqueous solution containing a zinc salt and aqueous ammonia; and (c) heating the aqueous solution to grow ZnO nanobars. In a variant, the method for preparing ZnO nanobars comprises the steps of: (1) coating a buffer layer on a substrate; (2) dipping the substrate coated with the buffer layer into an aqueous solution containing a zinc salt and aqueous ammonia; (3) heating the aqueous solution to form a ZnO seed layer; (4) forming a resist layer on the ZnO seed layer; (5) stacking a patterned mask on the resist layer and removing the non-shielded part of the resist layer through etching to provide a patterned substrate; and (6) dipping the patterned substrate into the aqueous solution containing a zinc salt and aqueous ammonia, followed by heating, to grow ZnO nanobars at the portion from which the resist layer is removed.
机译:提供了一种通过水热工艺或光刻工艺制备ZnO纳米棒的方法,以在低温下生产大面积的ZnO纳米棒,以允许控制ZnO纳米棒的生长,并允许纳米棒在基板上的期望位置对准。 。一种制备ZnO纳米棒的方法,包括以下步骤:(a)在基底上涂覆缓冲层; (b)将涂覆有缓冲层的基板浸入含有锌盐和氨水的水溶液中; (c)加热水溶液以生长ZnO纳米棒。在一种变型中,制备ZnO纳米棒的方法包括以下步骤:(1)在基底上涂覆缓冲层; (2)将涂覆有缓冲层的基板浸入含有锌盐和氨水的水溶液中; (3)加热水溶液形成ZnO晶种层; (4)在ZnO晶种层上形成抗蚀剂层; (5)在抗蚀剂层上堆叠图案化的掩模,并通过蚀刻去除抗蚀剂层的非屏蔽部分,以提供图案化的基板; (6)将图案化后的基板浸入含有锌盐和氨水的水溶液中,然后加热,以在去除抗蚀剂层的部分生长ZnO纳米棒。

著录项

  • 公开/公告号KR100790524B1

    专利类型

  • 公开/公告日2008-01-02

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20060024789

  • 发明设计人 용기중;탁영조;

    申请日2006-03-17

  • 分类号B82B3;C01G9/02;

  • 国家 KR

  • 入库时间 2022-08-21 19:52:44

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